SRP with salicide on top

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Posted by Luca Latessa (93.63.253.206) on July 19, 2011 at 05:33:36:

Hi, I would need to get SRP of high dose S/D implants (As and B) after a Ge implant amorphization and cobalt salicide formation on the wafer surface.

My question is if the SRP measurement is possible with that low resistivity salicide film (~200A) on top, or if it is necessary/advisable that I strip it away prior to the measurement.

Thanks.

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Re: SRP with salicide on top Dan 07/19/11 15:44:27 (0)

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Comments: : Hi, I would need to get SRP of high dose S/D implants (As and B) after a Ge implant amorphization and cobalt salicide formation on the wafer surface. : My question is if the SRP measurement is possible with that low resistivity salicide film (~200A) on top, or if it is necessary/advisable that I strip it away prior to the measurement. : Thanks.

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